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Laboratory of Nanotechnology Semiconductor Structures

A cleanroom class 1000 -100 with tools and infrastructure necessary to manufacture micro and nano scale devices.

The Laboratory is engaged in manufacturing of components and devices, small series production, performing trials and operations for the needs of universities, industry and schools.

Contact: inquiries@port.org.pl

 

  • Selection of technology, design, prototyping, small series production
  • Depositing of metallic and dielectric layers
  • Optic lithography, nanoimprint
  • Etching and structure creation (in nano and micro scale)
  • Characterisation (SEM/FIB, profile measurements)
  • Finishing (fine grinding/polishing, wire connections)

LITOGRAPHY

  • SÜSS MicroTec – the mask MA8 centring system with the SMILE nanoimprint system
  • Spincoater, Heating plates, HDMS furnace
  • Inspection microscopes LEICA

JOINING SUBSTARTES

  • SÜSS MicroTec SB8 – the system for joining substrates (wafer bonder)

ETCHING

  • Steam etching system IDONUS HF
  • Plasma systems SENTECH type ICP/RIE

EVAPORATING/SPRAYING OF FILMS – PREVAC

CHEMICAL DEPOSITION OF GAS PHASE

  • SENTECH: Deposition of silicon dioxide and silicon nitride films with the method: ICP:PECVD

GENERAL CHEMISTRY

  • Wet laboratory tables ARIAS for cleaning subgrades and etching of wet
  • Inspection microscopes LEICA

RAPID THERMAL PROCESSING (RTP)

CHRACTERISTICS AND ANALYSIS

  • Optical ellipsometer
  • Contact profilometer BRUKER
  • Optical profilometer BRUKER

OTHER

  • Wire bonder DELVOTEC
  • Tool for fine grinding/polishing Logitech

Katarzyna Komorowska, PhD Eng. – Laboratory Manager
Krzysztof Rola, PhD Eng. – Specialist of Scientific Matters
Daria Hlushchenko MSc. – Process Engineer
Ewelina Zdanowicz, MSc. Eng.
Katarzyna Opołczyńska MSc. Eng. – Specialist of Scientific Matters
Aleksander Szymczak – Technician

Project OPOUS financed by the National Science Centre entitled “Manufacturing and optimization of photonic components with electron and ion beam by polymerisation of ion liquids”.

  • Gas, J. Z. Domagała, R. Jakiela, Gerd Kunert, P. Dłużewski, E. Piskorska-Hommel, W. Paszkowicz, D. Sztenkiel, M. J. Winiarski, D. Kowalska, R. Szukiewicz, T. Baraniecki, A. Miszczuk, D. Hommel, M. Sawicki, Impact of substrate temperature on magnetic properties of plasmaassisted molecular beam epitaxy grown (Ga,Mn)N, Journal of Alloys and Compounds, 747 (2018) 946e959.
    Siudzińska, A. Miszczuk, J. Marczak, K. Komorowska, Fluorescent sensing with Fresnel microlenses for optofluidic systems, accepted in Optical Engineering (2017).
  • Czajkowski, J. Klajn, J. Cybińska, J. Feder-Kubis and K. Komorowska, Cholesteric gratings induced by electric field in mixtures of liquid crystal and novel chiral ionic liquid, Liquid Crystals (2016), DOI. 10.1080/02678292.2016.1254825.
  • Słupski, M.Nikodem, L.Chai, K.Komorowska; Fabrication of multilevel resist patterns by using a liquid crystal mask, Opt. Eng. 0001;54(11):115107, 2015
  • Czajkowski, J. Cybińska, M. Woźniak, P. Słupski, M. Nikodem, F. Granek, K. Komorowska, Incorporation of luminescent semiconductor nanoparticles into liquid crystal matrix, Journal of Luminescence, Volume 169, Part B, Pages 850-856, 2016
  • Nikodem, K. Krzempek, K. Zygadlo, G. Dudzik, A. Waz, K. Abramski, K. Komorowska Intracavity polarization control in mode-locked Er-doped fibre lasers using liquid crystals, Opto-Electronics Review, 22, 113-117, 2014.
  • Komorowska; K. Zygadlo; B. Cichy; M.l Nikodem, Investigation of liquid crystal materials doped with quantum dots: properties and potential applications, SPIE 8982, Optical Components and Materials XI, 89820A, 2014.

Prace z Heliosem Nanolab 660:

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Laboratorium Nanotechnologii Struktur Półprzewodnikowych


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Laboratorium Nanotechnologii Struktur Półprzewodnikowych

 

Polerowanie próbek:

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Laboratorium Nanotechnologii Struktur Półprzewodnikowych


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Laboratorium Nanotechnologii Struktur Półprzewodnikowych

 

Nanoszenie warstw metalicznych:

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Laboratorium Nanotechnologii Struktur Półprzewodnikowych


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Laboratorium Nanotechnologii Struktur Półprzewodnikowych

 

Litografia optyczna:

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Laboratorium Nanotechnologii Struktur Półprzewodnikowych

 

Maska do litografii:

IMG_0698

Laboratorium Nanotechnologii Struktur Półprzewodnikowych

 

Trawienie plazmowe:

20160719_112140

Laboratorium Nanotechnologii Struktur Półprzewodnikowych


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Laboratorium Nanotechnologii Struktur Półprzewodnikowych

 

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Posted by abachmatiuk, Posted on 20.07.2016
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