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The Laser Micromachinning Laboratory is equipped with the toolong enabling production of both flat as well as spatial microstructures. Precise positioning systems of the processed material and laser beam scanning allow for making the structures in the micrometric scale.

A wide spectrum of laser radiation sources from UV to infrared allows for execution of laser micromachining on a large variety of materials such as: metals, semiconductors, plastics, glass, ceramics.

Use of ultra-short laser impulses and radiation in the UV range ensures precise micro machining at minimal thermal reaction.


– Micro erosion, micro milling, precise cutting, micro perforation

– Manufacture of micro structures for photovoltaics, micro electronics, micro fluidics, MEMS

– Marking out of silicon and sapphire wafers

– Surface structuring

– Making of functional surfaces (e.g. hydrophobic, hydrophilic)

– Selective removal of thin layers

– Rapid prototyping and PCB circuits

– Colour marking


Micromachining system with picosecond laser

  • Three independent optical paths for the wavelengths of 1064, 532 and 355 nm
  • Each wavelength has a dedicated scanning head
  • Maximum average power: 36W @ 1064 nm, 19 W @ 532 nm, 6 W @ 355 nm
  • Pulse length: 15 ps
  • Minimum laser spot size: 20 μm


EIT+ Wrocławskie Centrum Badańlaboratoriafot. Lukasz Giza



Micromachining systems with excimer laser

  • Laser wavelength: 248 (KrF)
  • Maximum average power: 80 W
  • Pulse length: 12-20 ns
  • Minimum laser spot size: 5 µm

EIT+ Wrocławskie Centrum Badańlaboratoriafot. Lukasz Giza



Micromachining system with fiber laser and CO2 laser

  • Laser wavelengths: 1062 nm (fiber laser), 10 µm (CO2 laser)
  • Maximum average power: 20 W (fiber laser), 80  W (CO2 laser)
  • Pulse length of fiber laser: 3-500 ns


EIT+ Wrocławskie Centrum Badańlaboratoriafot. Lukasz Giza


  • Each system is mounted on a stable anti-vibration granite table equipped with three or four-axis CNC system which allows movement of the workpiece with an accuracy of 1 µm. In addition, the system with the picosecond and fibre lasers has a galvanometer scanhead constituting additional two optical axes.
  • Each system automatically measures the distance between focusing optics and workpiece allowing precise positioning of minimal laser spot on a sample.

Additional equipment:

  • Keyence VHX-1000 digital microscope with a magnification of 20 to 5 000 times, giving the opportunity to take measurements along three axes and creating 3D images.


EIT+ Wrocławskie Centrum Badańlaboratoriafot. Lukasz Giza

  • Seven-channel LIBS 2500plus spectrometer for the remote analysis of the composition of the tested samples.
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Posted by abachmatiuk, Posted on 27.01.2016